Irène Curie Fellowship
Photolithography machines play a central role in the production of ever smaller and faster microchips and represent high-precision systems of enormous complexity. Water conditioning is often required in sensitive modules of these machines to maintain strict thermal requirements. However, a negative consequence of this is that pressure disturbances in these water circuits can generate undesirable forces on the structure. These pressure disturbances may be flow induced, from circuit components and pumps, for example, but may also arise from vibrations of the structure leading to acoustic cross-talk between locations of differing dynamic sensitivity.
Current mitigation measures to limit the impact of pressure disturbances mainly involve passive mechanical devices, such as Helmholtz resonators, which can be used to achieve a certain level of suppression. It is the goal of this project to investigate whether an active control approach might offer advantages with respect to performance, volume requirements and flexibility. Such an active control system would use some combination of sensors, actuators and control algorithms, to be defined in the course of the study. The work will be carried out both at TU/e and ASML premises.
A general outline of the project can be envisaged as follows:
MSc degree in Engineering Sciences or Applied Physics, preferably with a background on structural dynamic behavior and/or control systems. You should have experience with the combination of numerical modelling and measurements.Conditions of employment
A meaningful job in a dynamic and ambitious university, in an interdisciplinary setting and within an international network. You will work on a beautiful, green campus within walking distance of the central train station. In addition, we offer you:
Eindhoven University of Technology is an internationally top-ranking university in the Netherlands that combines scientific curiosity with a hands- on attitude. Our spirit of collaboration translates into an open culture and a top-five position in collaborating with advanced industries. Fundamental knowledge enables us to design solutions for the highly complex problems of today and tomorrow.
Do you recognize yourself in this profile and would you like to know more? Please contact the hiring manager prof.dr.ir. David Smeulders (d.m.j.smeuldersattue.nl) or Nicholas Waterson (nicholas.watersonatasml.com).
Visit our website for more information about the application process or the conditions of employment. You can also contact Human resources ME, hradvicemeattue.nl.
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