PhD Fabrication of nanoelectronics using area-selective atomic layer deposition

Eindhoven University of Technology
January 15, 2023
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PhD Fabrication of nanoelectronics using area-selective atomic layer

deposition

Are you fascinated by the miniaturization of electronic structures and how that enables a range of other technologies from mobile computing to artificial intelligence? And do you want to contribute to pushing the miniaturization of materials to the atomic level?

Position

PhD-student

Irène Curie Fellowship

No

Department(s)

Applied Physics and Science Education

FTE

1,0

Date off

15/01/2023

Reference number

V34.6119

Job description

Research

The goal of this PhD project is to synthesize materials using atoms as building blocks in a bottom-up fashion. The fabrication of nanoelectronics currently relies almost completely on top-down processing, which is becoming more and more demanding at the nanoscale dimensions of future devices. While the ambition of using atomic building blocks connects to Feynman's vision formulated in his lecture “ There is plenty of room at the bottom ”, the realisation of bottom-up fabrication still remains a challenge, especially when considering approaches that can employed for high-volume manufacturing.

In this PhD project, innovative schemes for bottom-up fabrication will be realized by developing approaches for area-selective atomic layer deposition (ALD). The challenge of making ALD processes selective to specific locations currently suffers from a lack of understanding of how ALD growth can effectively be blocked on surfaces where no growth is desired. See for more information the blog of our group, e.g. https: // www. atomiclimits.com/2018/12/21/towards-area-selective-atomic-layer- deposition-with-high-selectivity-our-perspective-on-area-selective-ald/ and https: // www. atomiclimits.com/2022/04/18/area-selective-ald-of-diffusion- barriers-for-via-optimization-there-is-plenty-of-room-at-the-bottom/.

Project & Job description

We are looking for a PhD student who is interested in performing experimental studies towards the development of area-selective ALD approaches. A variety of experimental techniques will be employed to obtain fundamental insights into the growth and the surface chemistry such as in-situ ellipsometry and Fourier transform infrared spectroscopy. In order to demonstrate selective processes, depositions will be performed on patterned samples, and analyzed by scanning and transmission electron microscopy. These experimental studies will be complemented with theoretical studies together with other project members. The project will be carried out in strong collaboration with several industrial partners in the semiconductor industry.

Location

The work will be performed in the group Plasma & Materials Processing and in the NanoLab cleanroom at the Department of Applied Physics at the TU/e. The PMP group focuses on the advancement of the science and technology of plasma and materials processing, a research area which is in essence multidisciplinary and encompasses the research fields of plasma physics, surface science, and materials science. The scientific objective of the group is to obtain “atomic” level understanding of the interaction of plasmas and gases with materials.

Job requirements

Qualifications:

For this PhD position, we are looking for a highly talented, enthusiastic, and exceptionally motivated candidate with MSc degree (or equivalent) in Chemistry, Chemical Engineering, Material Science, (Applied) Physics, Electrical Engineering, or similar. The candidate must have a strong background in either chemistry or physics. Experience in the areas of surface science or thin film deposition would be an asset. To facilitate the collaboration within the project, the candidate should have interest in the interpretation of theoretical studies, as well as in device fabrication schemes. Good communication skills in English (both written and spoken) are required.

Responsibilities and tasks:

  • Investigation of the interactions between inhibitor/precursor molecules and materials using various in-situ diagnostic techniques.
  • Development of area-selective ALD processes, analysis of the deposited films, and demonstration of the selectivity.
  • Report results to collaborators, preparation of scientific papers and conference presentations.
  • Daily supervision of BSc, and MSc students.
  • Job Requirements

  • MSc degree in Chemistry, Chemical Engineering, Material Science, (Applied) Physics, Electrical Engineering, or a comparable domain.
  • Excellent mastering of the English language, good communication skills. Note that there is no Dutch language requirement.
  • Be a team player and able to work in a dynamic, interdisciplinary context.
  • Conditions of employment

    A meaningful job in a dynamic and ambitious university, in an interdisciplinary setting and within an international network. You will work on a beautiful, green campus within walking distance of the central train station. In addition, we offer you:

  • Full-time employment for four years, with an intermediate evaluation (go/no-go) after nine months. You will spend 10% of your employment on teaching tasks.
  • Salary and benefits (such as a pension scheme, paid pregnancy and maternity leave, partially paid parental leave) in accordance with the Collective Labour Agreement for Dutch Universities.
  • A year-end bonus of 8.3% and annual vacation pay of 8%.
  • High-quality training programs and other support to grow into a self- aware, autonomous scientific researcher. At TU/e we challenge you to take charge of your own learning process.
  • An excellent technical infrastructure, on-campus children's day care and sports facilities.
  • An allowance for commuting, working from home and internet costs.
  • A Staff Immigration Team and a tax compensation scheme (the 30% facility) for international candidates.
  • Information and application

    About us

    Eindhoven University of Technology is an internationally top-ranking university in the Netherlands that combines scientific curiosity with a hands- on attitude. Our spirit of collaboration translates into an open culture and a top-five position in collaborating with advanced industries. Fundamental knowledge enables us to design solutions for the highly complex problems of today and tomorrow. Curious to hear more about what it's like as a PhD candidate at TU/e? Please view the video.

    Do you recognize yourself in this profile and would you like to know more about the vacancy? Please contact Dr.ir. A.J.M. Mackus (e-mail a.j.m.mackusattue.nl).

    Visit our website for more information about the application process or the conditions of employment. You can also contact HR Services (e-mail HRServices.Fluxattue.nl).

    Are you inspired and would like to know more about working at TU/e? Please visit our career page.

    Application

    Applications should include:

  • A cover letter explaining your motivation and qualifications for the position. Please describe in a separate paragraph why you are specifically interested in this project.
  • A detailed CV.
  • A list of publications and conference contributions.
  • Names and contact information of two or more references.
  • Screening of applications will start as soon as applications are received and will continue until the position has been filled.

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